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- W2368756948 abstract "Silicon epitaxial growth technique by plasma chemital vapor deposition has ben desveloped. Epitaxinl thin films grew on Si(100)P substrates.The coneenthetion of SiH4 could be examined by QMS.At 600℃,when the pressure was 300mTorr,the growth rate was greatest, 450 /min,and thecontent of H in the films was lower, 1.5% at.When the pressure was 30 mtorr,at 700℃,Thegroan rate increased to 59. 6℃ /min ,and the content of H in the films decreased to 2.75% at." @default.
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- W2368756948 date "1994-01-01" @default.
- W2368756948 modified "2023-09-23" @default.
- W2368756948 title "Epitaxial Silicon by Plasma Chemical Vapor Deposition" @default.
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