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- W2368774821 abstract "Silica impurity in the high purity water that is used for MOVPE(Metallorganic Vapor Phase Epitaxy) processes affects the quality of GaAs material dramatically.The principles and methods of EDI(Electrodeionizaion) to remove silica from high purity water are introduced.Based on comparison of the efficiencies of silicon removal experiment by using various water fabrication equipments,it was determined that in order to obtain the best silicon removal efficiency the pH values should be controlled between 8 5 to 11.The silicon concentration in high purity water could be decreased to below 0 5μg/L which satisfied the requirement needed for the fabrication of metallorganic sources and MOVPE process." @default.
- W2368774821 created "2016-06-24" @default.
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- W2368774821 date "2003-01-01" @default.
- W2368774821 modified "2023-09-23" @default.
- W2368774821 title "Silica Removal from Purified Water Produced for MOVPE Process" @default.
- W2368774821 hasPublicationYear "2003" @default.
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