FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2368952363> ?p ?o ?g. }

• W2368952363 abstract "As dimension of middle-of-line contacts scale down, the Tungsten (W) gap-fill capability is critical, and we starts to see function failure in SRAM and logic circuit caused by W-voids. We had observed that formation of W-voids is related to the contact profile, nucleation/barrier on sidewall, and deposition methods. Furthermore, even those initially good W-plugs are formed, the subsequent process steps may damage the W-plug toward voids and they lead to high resistance and failures in logic circuit and SRAM. We analyzed mechanisms and illustrated solutions systematically with in-line detection method also discussed for technology development as well as manufacturing in paper." @default.
• W2368952363 created "2016-06-24" @default.
• W2368952363 creator A5003213199 @default.
• W2368952363 creator A5022802322 @default.
• W2368952363 creator A5025350187 @default.
• W2368952363 creator A5033041437 @default.
• W2368952363 creator A5035804461 @default.
• W2368952363 creator A5037741969 @default.
• W2368952363 creator A5043714535 @default.
• W2368952363 creator A5051893509 @default.
• W2368952363 creator A5057248376 @default.
• W2368952363 creator A5080827106 @default.
• W2368952363 creator A5083831344 @default.
• W2368952363 creator A5087888507 @default.
• W2368952363 date "2016-03-01" @default.
• W2368952363 modified "2023-09-24" @default.
• W2368952363 title "Elimination of Tungsten-voids in middle-of-line contacts for advanced planar CMOS AND FinFET technology" @default.
• W2368952363 cites W2074323725 @default.
• W2368952363 cites W2083755445 @default.
• W2368952363 cites W2104784578 @default.
• W2368952363 doi "https://doi.org/10.1109/cstic.2016.7464004" @default.
• W2368952363 hasPublicationYear "2016" @default.
• W2368952363 type Work @default.
• W2368952363 sameAs 2368952363 @default.
• W2368952363 citedByCount "0" @default.
• W2368952363 crossrefType "proceedings-article" @default.
• W2368952363 hasAuthorship W2368952363A5003213199 @default.
• W2368952363 hasAuthorship W2368952363A5022802322 @default.
• W2368952363 hasAuthorship W2368952363A5025350187 @default.
• W2368952363 hasAuthorship W2368952363A5033041437 @default.
• W2368952363 hasAuthorship W2368952363A5035804461 @default.
• W2368952363 hasAuthorship W2368952363A5037741969 @default.
• W2368952363 hasAuthorship W2368952363A5043714535 @default.
• W2368952363 hasAuthorship W2368952363A5051893509 @default.
• W2368952363 hasAuthorship W2368952363A5057248376 @default.
• W2368952363 hasAuthorship W2368952363A5080827106 @default.
• W2368952363 hasAuthorship W2368952363A5083831344 @default.
• W2368952363 hasAuthorship W2368952363A5087888507 @default.
• W2368952363 hasConcept C119599485 @default.
• W2368952363 hasConcept C121332964 @default.
• W2368952363 hasConcept C121684516 @default.
• W2368952363 hasConcept C127413603 @default.
• W2368952363 hasConcept C131017901 @default.
• W2368952363 hasConcept C134786449 @default.
• W2368952363 hasConcept C164205550 @default.
• W2368952363 hasConcept C191897082 @default.
• W2368952363 hasConcept C192562407 @default.
• W2368952363 hasConcept C198352243 @default.
• W2368952363 hasConcept C24326235 @default.
• W2368952363 hasConcept C2524010 @default.
• W2368952363 hasConcept C33923547 @default.
• W2368952363 hasConcept C41008148 @default.
• W2368952363 hasConcept C46362747 @default.
• W2368952363 hasConcept C49040817 @default.
• W2368952363 hasConcept C542268612 @default.
• W2368952363 hasConcept C61048295 @default.
• W2368952363 hasConcept C68043766 @default.
• W2368952363 hasConcept C78519656 @default.
• W2368952363 hasConcept C97355855 @default.
• W2368952363 hasConceptScore W2368952363C119599485 @default.
• W2368952363 hasConceptScore W2368952363C121332964 @default.
• W2368952363 hasConceptScore W2368952363C121684516 @default.
• W2368952363 hasConceptScore W2368952363C127413603 @default.
• W2368952363 hasConceptScore W2368952363C131017901 @default.
• W2368952363 hasConceptScore W2368952363C134786449 @default.
• W2368952363 hasConceptScore W2368952363C164205550 @default.
• W2368952363 hasConceptScore W2368952363C191897082 @default.
• W2368952363 hasConceptScore W2368952363C192562407 @default.
• W2368952363 hasConceptScore W2368952363C198352243 @default.
• W2368952363 hasConceptScore W2368952363C24326235 @default.
• W2368952363 hasConceptScore W2368952363C2524010 @default.
• W2368952363 hasConceptScore W2368952363C33923547 @default.
• W2368952363 hasConceptScore W2368952363C41008148 @default.
• W2368952363 hasConceptScore W2368952363C46362747 @default.
• W2368952363 hasConceptScore W2368952363C49040817 @default.
• W2368952363 hasConceptScore W2368952363C542268612 @default.
• W2368952363 hasConceptScore W2368952363C61048295 @default.
• W2368952363 hasConceptScore W2368952363C68043766 @default.
• W2368952363 hasConceptScore W2368952363C78519656 @default.
• W2368952363 hasConceptScore W2368952363C97355855 @default.
• W2368952363 hasLocation W23689523631 @default.
• W2368952363 hasOpenAccess W2368952363 @default.
• W2368952363 hasPrimaryLocation W23689523631 @default.
• W2368952363 hasRelatedWork W1521051839 @default.
• W2368952363 hasRelatedWork W1525349195 @default.
• W2368952363 hasRelatedWork W1603478373 @default.
• W2368952363 hasRelatedWork W1607288236 @default.
• W2368952363 hasRelatedWork W1706470619 @default.
• W2368952363 hasRelatedWork W2021226137 @default.
• W2368952363 hasRelatedWork W2032729511 @default.
• W2368952363 hasRelatedWork W2052501917 @default.
• W2368952363 hasRelatedWork W2106469196 @default.
• W2368952363 hasRelatedWork W2117177846 @default.
• W2368952363 hasRelatedWork W2159923640 @default.
• W2368952363 hasRelatedWork W2161310373 @default.
• W2368952363 hasRelatedWork W2378114592 @default.
• W2368952363 hasRelatedWork W2428054523 @default.
• W2368952363 hasRelatedWork W2526988581 @default.
• W2368952363 hasRelatedWork W2532728166 @default.
• W2368952363 hasRelatedWork W2534796552 @default.

• next