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- W2369144438 abstract "The present work is devoted to investigate the physical origin of the crack pattern formation in the lead zirconate titanate(PZT) thin films after annealing,and the scaling law between the crack spacing and the thickness.By the Radio Frequency(RF) magnetron sputtering method,PZT thin films are deposited on bared silicon(100) substrates.Optical microscope and scanning electron microscope(SEM) are utilized for characterization.Theoretically,the energy balance method is employed to analyze the strain and stress relation during the crack formation and buckling instability,by which the scaling law is predicted.Crack spacing is linear dependent on the film thickness,these cracks divide the film into polygon domains constituting the hierarchical pattern.Additionally,the cracks coexist with the significant buckling bubbles generated by the large lattice mismatch between the film and the substrate,but these cracks can be hindered by sputtering PZT film on the hot substrate.This findings will be helpful to understand the mechanical behavior of ferroelectric PZT films during the manufacturing process." @default.
- W2369144438 created "2016-06-24" @default.
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- W2369144438 date "2013-01-01" @default.
- W2369144438 modified "2023-09-24" @default.
- W2369144438 title "The crack formation mechanism and the scaling law of lead zirconate titanate film" @default.
- W2369144438 hasPublicationYear "2013" @default.
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