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- W2369159902 abstract "The boron-doped nanograin polysilicon films(nc-poly-Si(B)) are fabricated on crystal Si or quartz substrates by low pressure chemical vapor depotition(LPCVD) via in situ doping method.SiH4 and B2H6 are used as reactive gas and doping soruce,respectively.The microstructure of the as-deposited and annealed thin films are demonstrated by scanning electronic microscopy(SEM),atomic force microscopy(AFM) and Raman scattering spectroscopy.The results indicate that the size and the density of Si nanograins fabricated under typical experimental conditions are about 15 nm and 9.0×1010 cm-2,respectively.After thermal annealing,the sizes of Si grains becom bigger,arrange is more orderliness,and conductance properties of the films are also significantly improved.The sheet resistances of the nc-poly-Si(B) films are measured by four probe method,and the effects of B doping concentration and thermal annealing on electrical properties are also discussed." @default.
- W2369159902 created "2016-06-24" @default.
- W2369159902 creator A5024225338 @default.
- W2369159902 date "2008-01-01" @default.
- W2369159902 modified "2023-09-26" @default.
- W2369159902 title "Structural Characteristics and Electrical Properties of the Boron-doped Nanograin Polysilicon Thin Films" @default.
- W2369159902 hasPublicationYear "2008" @default.
- W2369159902 type Work @default.
- W2369159902 sameAs 2369159902 @default.
- W2369159902 citedByCount "0" @default.
- W2369159902 crossrefType "journal-article" @default.
- W2369159902 hasAuthorship W2369159902A5024225338 @default.
- W2369159902 hasConcept C113196181 @default.
- W2369159902 hasConcept C120665830 @default.
- W2369159902 hasConcept C121332964 @default.
- W2369159902 hasConcept C159985019 @default.
- W2369159902 hasConcept C169573571 @default.
- W2369159902 hasConcept C171250308 @default.
- W2369159902 hasConcept C178790620 @default.
- W2369159902 hasConcept C185592680 @default.
- W2369159902 hasConcept C19067145 @default.
- W2369159902 hasConcept C192562407 @default.
- W2369159902 hasConcept C2777855556 @default.
- W2369159902 hasConcept C40003534 @default.
- W2369159902 hasConcept C43617362 @default.
- W2369159902 hasConcept C49040817 @default.
- W2369159902 hasConcept C501308230 @default.
- W2369159902 hasConcept C544956773 @default.
- W2369159902 hasConcept C57410435 @default.
- W2369159902 hasConcept C57863236 @default.
- W2369159902 hasConcept C87976508 @default.
- W2369159902 hasConceptScore W2369159902C113196181 @default.
- W2369159902 hasConceptScore W2369159902C120665830 @default.
- W2369159902 hasConceptScore W2369159902C121332964 @default.
- W2369159902 hasConceptScore W2369159902C159985019 @default.
- W2369159902 hasConceptScore W2369159902C169573571 @default.
- W2369159902 hasConceptScore W2369159902C171250308 @default.
- W2369159902 hasConceptScore W2369159902C178790620 @default.
- W2369159902 hasConceptScore W2369159902C185592680 @default.
- W2369159902 hasConceptScore W2369159902C19067145 @default.
- W2369159902 hasConceptScore W2369159902C192562407 @default.
- W2369159902 hasConceptScore W2369159902C2777855556 @default.
- W2369159902 hasConceptScore W2369159902C40003534 @default.
- W2369159902 hasConceptScore W2369159902C43617362 @default.
- W2369159902 hasConceptScore W2369159902C49040817 @default.
- W2369159902 hasConceptScore W2369159902C501308230 @default.
- W2369159902 hasConceptScore W2369159902C544956773 @default.
- W2369159902 hasConceptScore W2369159902C57410435 @default.
- W2369159902 hasConceptScore W2369159902C57863236 @default.
- W2369159902 hasConceptScore W2369159902C87976508 @default.
- W2369159902 hasLocation W23691599021 @default.
- W2369159902 hasOpenAccess W2369159902 @default.
- W2369159902 hasPrimaryLocation W23691599021 @default.
- W2369159902 hasRelatedWork W1278232613 @default.
- W2369159902 hasRelatedWork W1973248683 @default.
- W2369159902 hasRelatedWork W1976494427 @default.
- W2369159902 hasRelatedWork W1997383711 @default.
- W2369159902 hasRelatedWork W2000944850 @default.
- W2369159902 hasRelatedWork W2010542496 @default.
- W2369159902 hasRelatedWork W2017458218 @default.
- W2369159902 hasRelatedWork W2036417914 @default.
- W2369159902 hasRelatedWork W2072699485 @default.
- W2369159902 hasRelatedWork W2090938051 @default.
- W2369159902 hasRelatedWork W2140586173 @default.
- W2369159902 hasRelatedWork W2183473628 @default.
- W2369159902 hasRelatedWork W2290537329 @default.
- W2369159902 hasRelatedWork W2357830819 @default.
- W2369159902 hasRelatedWork W2385451646 @default.
- W2369159902 hasRelatedWork W2415796259 @default.
- W2369159902 hasRelatedWork W257324301 @default.
- W2369159902 hasRelatedWork W2922176155 @default.
- W2369159902 hasRelatedWork W3018433608 @default.
- W2369159902 hasRelatedWork W304452319 @default.
- W2369159902 isParatext "false" @default.
- W2369159902 isRetracted "false" @default.
- W2369159902 magId "2369159902" @default.
- W2369159902 workType "article" @default.