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- W2369519611 abstract "The rapid development of capacitive MEMS sensors poses a big challenge for high-precision integrated readout circuit design.Some key design limitations are discussed and a review of capacitive readout front-end circuits for MEMS sensors is presented.The primary design parameters and their trade-offs affecting the resolution are also studied,with a view to applying to all types of the capacitive MEMS sensor interface.Finally,the research trend in capacitive readout circuit design area is summarized." @default.
- W2369519611 created "2016-06-24" @default.
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- W2369519611 date "2007-01-01" @default.
- W2369519611 modified "2023-09-23" @default.
- W2369519611 title "Study on MEMS Precision Capacitive Readout Circuits Design" @default.
- W2369519611 hasPublicationYear "2007" @default.
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