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- W2369979785 abstract "Au film has been deposited on CdZnTe semiconductor with high resistivity by DC magnetron sputtering.The influences of the sputtering power on deposition rate,film structure,and contact performance of the film prepared on CdZnTe substrate have been investigated.It is shown that the deposition rate of Au film is firstly increased and then decreased subsequently with the increase of sputtering power.I-V test shows that the ohmic contact properties are well even though without heat treatment.The ohmic contact properties under sputtering power of 100W are better than those under sputtering power of 40 and 70W,respectively." @default.
- W2369979785 created "2016-06-24" @default.
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- W2369979785 date "2006-01-01" @default.
- W2369979785 modified "2023-09-23" @default.
- W2369979785 title "Influences of Sputtering Power on Contact Structure and Performance of Au Films and CdZnTe Crystal" @default.
- W2369979785 hasPublicationYear "2006" @default.
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