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- W2369988928 abstract "Precision evaluation method for Nanometrics measurement system was studied by using PPM,SPC and mathematical statistics method to analyze and process samples.Difficulties in data collecting,analyzing and processing were discussed,and the accuracy of the Nanometrics measurement system was calculated to be 1.25%.A precision evaluation method suitable for film thickness measurement system was presented." @default.
- W2369988928 created "2016-06-24" @default.
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- W2369988928 date "2010-01-01" @default.
- W2369988928 modified "2023-09-23" @default.
- W2369988928 title "Precision Evaluation Method for Nanometrics Measurement System" @default.
- W2369988928 hasPublicationYear "2010" @default.
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