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- W2370167360 abstract "SHE (Substrate hot electron) enhanced breakdown characteristics of thin SiO 2 are investigated by using SHE injection techniques.These experiments reveal that the average electron energy in the oxide depends on substrate voltage strongly.The average electron energy injected into oxide can be calculated by using the energy-conservation equation.The difference between SHE injection and F-N tunneling can be explained in terms of the caculated electron energy.A SHE enhanced TDDB model is presented in this paper." @default.
- W2370167360 created "2016-06-24" @default.
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- W2370167360 date "2001-01-01" @default.
- W2370167360 modified "2023-09-28" @default.
- W2370167360 title "Study of Substrate Hot Electron Enhanced Breakdown Characteristics of Thin SiO_2" @default.
- W2370167360 hasPublicationYear "2001" @default.
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