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- W2370461188 abstract "A novel atomic force microscope(AFM)system based on plate scanner is developed.We innovatively integrates two-dimensional plate scanner with one-dimensional feedback controller,which effectively overcomes the nonlinear cross-coupling error between Z feedback control and XY scan plane in the traditional scanner,and furthermore guarantees the stability of detection beam path with large scan range.The scan comparison experiments of the alumina films and the optical gratings have been done by using the system and the traditional AFM respectively.The results indicate that the regular images of the sample surface with no distortion are successfully gained." @default.
- W2370461188 created "2016-06-24" @default.
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- W2370461188 date "2007-01-01" @default.
- W2370461188 modified "2023-09-27" @default.
- W2370461188 title "A new type of atomic force microscope system based on plate scanner" @default.
- W2370461188 hasPublicationYear "2007" @default.
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