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- W2370484637 abstract "Excimer laserg are noted primarily for their ability to produce high output powers at ultraviolet wavelengths. This ability has made them attractive for lithography application. Excimer lasers are many times more powerful than conventional deep-ultraviolet sources like xenon mercury lamp.An experiment of contact photolithography in the order of a micrometer was demonstrated by using an ultraviolet XeCl excimer laser. An X-ray preionized discharge pumped xenonohloride laser was used to expose a thin layer of resist. The laser, which emits at 308nm, delivered 10MW of peak power in a 2×2 cm2 beam. A chromeon-quartz mask with features ranging from 1.0-10μm wag employed tfor contact photolithography.After optimization of the laser power intensity on the resist, the best laser power intensity for contact photolithography was found to be about 0.2J'cm2 under our experimental condition. The pattern on the resist shows that linewidths down to 1.5 μm can be resolved, and 2 .5μm lines can meet the requirements of LSI.This technique has great implications for photolithography because is has high resolutions and ultra-fast exposure times." @default.
- W2370484637 created "2016-06-24" @default.
- W2370484637 creator A5049807131 @default.
- W2370484637 date "1986-01-01" @default.
- W2370484637 modified "2023-09-25" @default.
- W2370484637 title "Preliminary research of contact photolithography by using a UV excimer laser" @default.
- W2370484637 hasPublicationYear "1986" @default.
- W2370484637 type Work @default.
- W2370484637 sameAs 2370484637 @default.
- W2370484637 citedByCount "0" @default.
- W2370484637 crossrefType "journal-article" @default.
- W2370484637 hasAuthorship W2370484637A5049807131 @default.
- W2370484637 hasConcept C105487726 @default.
- W2370484637 hasConcept C120665830 @default.
- W2370484637 hasConcept C121332964 @default.
- W2370484637 hasConcept C171250308 @default.
- W2370484637 hasConcept C178790620 @default.
- W2370484637 hasConcept C185592680 @default.
- W2370484637 hasConcept C192562407 @default.
- W2370484637 hasConcept C204223013 @default.
- W2370484637 hasConcept C2776798109 @default.
- W2370484637 hasConcept C2779227376 @default.
- W2370484637 hasConcept C2780477314 @default.
- W2370484637 hasConcept C49040817 @default.
- W2370484637 hasConcept C520434653 @default.
- W2370484637 hasConcept C53524968 @default.
- W2370484637 hasConcept C548442186 @default.
- W2370484637 hasConcept C6260449 @default.
- W2370484637 hasConcept C74561354 @default.
- W2370484637 hasConceptScore W2370484637C105487726 @default.
- W2370484637 hasConceptScore W2370484637C120665830 @default.
- W2370484637 hasConceptScore W2370484637C121332964 @default.
- W2370484637 hasConceptScore W2370484637C171250308 @default.
- W2370484637 hasConceptScore W2370484637C178790620 @default.
- W2370484637 hasConceptScore W2370484637C185592680 @default.
- W2370484637 hasConceptScore W2370484637C192562407 @default.
- W2370484637 hasConceptScore W2370484637C204223013 @default.
- W2370484637 hasConceptScore W2370484637C2776798109 @default.
- W2370484637 hasConceptScore W2370484637C2779227376 @default.
- W2370484637 hasConceptScore W2370484637C2780477314 @default.
- W2370484637 hasConceptScore W2370484637C49040817 @default.
- W2370484637 hasConceptScore W2370484637C520434653 @default.
- W2370484637 hasConceptScore W2370484637C53524968 @default.
- W2370484637 hasConceptScore W2370484637C548442186 @default.
- W2370484637 hasConceptScore W2370484637C6260449 @default.
- W2370484637 hasConceptScore W2370484637C74561354 @default.
- W2370484637 hasLocation W23704846371 @default.
- W2370484637 hasOpenAccess W2370484637 @default.
- W2370484637 hasPrimaryLocation W23704846371 @default.
- W2370484637 hasRelatedWork W1971705391 @default.
- W2370484637 hasRelatedWork W1975709598 @default.
- W2370484637 hasRelatedWork W1977525388 @default.
- W2370484637 hasRelatedWork W1980131984 @default.
- W2370484637 hasRelatedWork W1987255110 @default.
- W2370484637 hasRelatedWork W1996949467 @default.
- W2370484637 hasRelatedWork W1999283028 @default.
- W2370484637 hasRelatedWork W2014212607 @default.
- W2370484637 hasRelatedWork W2028704672 @default.
- W2370484637 hasRelatedWork W2046293781 @default.
- W2370484637 hasRelatedWork W2052584614 @default.
- W2370484637 hasRelatedWork W2059213112 @default.
- W2370484637 hasRelatedWork W2070543786 @default.
- W2370484637 hasRelatedWork W2075543283 @default.
- W2370484637 hasRelatedWork W2079822627 @default.
- W2370484637 hasRelatedWork W2094573751 @default.
- W2370484637 hasRelatedWork W2160682960 @default.
- W2370484637 hasRelatedWork W2089713330 @default.
- W2370484637 hasRelatedWork W2843233078 @default.
- W2370484637 hasRelatedWork W3143166834 @default.
- W2370484637 isParatext "false" @default.
- W2370484637 isRetracted "false" @default.
- W2370484637 magId "2370484637" @default.
- W2370484637 workType "article" @default.