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- W2370599384 abstract "On the basis of the requirements of the macro table driven by high-performance linear motor and macro-micro driving precision positioning mechanism,micro table is designed based on flexure hinge,which can achieve large stroke and nanometer positioning. Micro-table mounted on the macro-table is driven by piezoelectric actuator. High-precision absolute grating and high-precision incremental grating are adopted to solve the problem of large stroke and high resolution. Close-loop position control can be realized as well. Based on the design of table,the dynamic model of macro-micro table are built and simulated,the performances of the system are analyzed in the end." @default.
- W2370599384 created "2016-06-24" @default.
- W2370599384 creator A5026124478 @default.
- W2370599384 date "2014-01-01" @default.
- W2370599384 modified "2023-09-23" @default.
- W2370599384 title "Micro Table Design of Flexure Hinge" @default.
- W2370599384 hasPublicationYear "2014" @default.
- W2370599384 type Work @default.
- W2370599384 sameAs 2370599384 @default.
- W2370599384 citedByCount "1" @default.
- W2370599384 countsByYear W23705993842018 @default.
- W2370599384 crossrefType "journal-article" @default.
- W2370599384 hasAuthorship W2370599384A5026124478 @default.
- W2370599384 hasConcept C120665830 @default.
- W2370599384 hasConcept C121332964 @default.
- W2370599384 hasConcept C124101348 @default.
- W2370599384 hasConcept C127413603 @default.
- W2370599384 hasConcept C154945302 @default.
- W2370599384 hasConcept C166955791 @default.
- W2370599384 hasConcept C172707124 @default.
- W2370599384 hasConcept C199360897 @default.
- W2370599384 hasConcept C2777813233 @default.
- W2370599384 hasConcept C41008148 @default.
- W2370599384 hasConcept C44000306 @default.
- W2370599384 hasConcept C44154836 @default.
- W2370599384 hasConcept C45235069 @default.
- W2370599384 hasConcept C78519656 @default.
- W2370599384 hasConceptScore W2370599384C120665830 @default.
- W2370599384 hasConceptScore W2370599384C121332964 @default.
- W2370599384 hasConceptScore W2370599384C124101348 @default.
- W2370599384 hasConceptScore W2370599384C127413603 @default.
- W2370599384 hasConceptScore W2370599384C154945302 @default.
- W2370599384 hasConceptScore W2370599384C166955791 @default.
- W2370599384 hasConceptScore W2370599384C172707124 @default.
- W2370599384 hasConceptScore W2370599384C199360897 @default.
- W2370599384 hasConceptScore W2370599384C2777813233 @default.
- W2370599384 hasConceptScore W2370599384C41008148 @default.
- W2370599384 hasConceptScore W2370599384C44000306 @default.
- W2370599384 hasConceptScore W2370599384C44154836 @default.
- W2370599384 hasConceptScore W2370599384C45235069 @default.
- W2370599384 hasConceptScore W2370599384C78519656 @default.
- W2370599384 hasLocation W23705993841 @default.
- W2370599384 hasOpenAccess W2370599384 @default.
- W2370599384 hasPrimaryLocation W23705993841 @default.
- W2370599384 hasRelatedWork W1968878191 @default.
- W2370599384 hasRelatedWork W1994199501 @default.
- W2370599384 hasRelatedWork W2028488384 @default.
- W2370599384 hasRelatedWork W2034680454 @default.
- W2370599384 hasRelatedWork W2092436529 @default.
- W2370599384 hasRelatedWork W2149293046 @default.
- W2370599384 hasRelatedWork W2154176637 @default.
- W2370599384 hasRelatedWork W2154873270 @default.
- W2370599384 hasRelatedWork W2162159831 @default.
- W2370599384 hasRelatedWork W2317335646 @default.
- W2370599384 hasRelatedWork W2361548586 @default.
- W2370599384 hasRelatedWork W2367939192 @default.
- W2370599384 hasRelatedWork W2372236674 @default.
- W2370599384 hasRelatedWork W2380115249 @default.
- W2370599384 hasRelatedWork W2381731604 @default.
- W2370599384 hasRelatedWork W2382822422 @default.
- W2370599384 hasRelatedWork W2386600126 @default.
- W2370599384 hasRelatedWork W2387897689 @default.
- W2370599384 hasRelatedWork W2389355147 @default.
- W2370599384 hasRelatedWork W2532823697 @default.
- W2370599384 isParatext "false" @default.
- W2370599384 isRetracted "false" @default.
- W2370599384 magId "2370599384" @default.
- W2370599384 workType "article" @default.