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- W2370601273 abstract "This paper introduces a new three direction illumination system with light intensity, angle of incidence and distance of incidence precisely real-time regulated is proposed for observation of 3D microstructure of MEMS. Three-dimensional images and the surface of the microstructure can be achieved by using this system. In the process of designing the surface matrix CCD micro-measurement system, calibration errors have a direct effect on the measurement accuracy of the system. A new method, which is simpler, faster, more convenient and more applicable than the traditional method, is proposed to calibrate and reduce calibration errors. The calibration accuracy of the system is up to (±0.001 5) μm and its measurement accuracy is up to ±1 μm. This system is suitable for calibration at the level of micron." @default.
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- W2370601273 date "2004-01-01" @default.
- W2370601273 modified "2023-09-23" @default.
- W2370601273 title "Observation and measurement system for microstructure based on three-direction fiber illumination" @default.
- W2370601273 hasPublicationYear "2004" @default.
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