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- W2370605318 abstract "The principle of voltage contrast imaging, EB induced conductivity imaging,resistance contrast imaging used in IC failure analysis are introduced. The imaging methods andcharacteristics of static/dynamic/ captive couple voltage contrast imaging, EB induced conductivityimaging are carried out. All of the work provides theory basis and practice gist for usage of dynamicEB probe techniques in sub-micron and deep sub-micron IC." @default.
- W2370605318 created "2016-06-24" @default.
- W2370605318 creator A5031818075 @default.
- W2370605318 date "2004-01-01" @default.
- W2370605318 modified "2023-09-23" @default.
- W2370605318 title "Study of dynamic electron-beam probe techniques in submicron and deep submicron IC" @default.
- W2370605318 hasPublicationYear "2004" @default.
- W2370605318 type Work @default.
- W2370605318 sameAs 2370605318 @default.
- W2370605318 citedByCount "0" @default.
- W2370605318 crossrefType "journal-article" @default.
- W2370605318 hasAuthorship W2370605318A5031818075 @default.
- W2370605318 hasConcept C119599485 @default.
- W2370605318 hasConcept C120665830 @default.
- W2370605318 hasConcept C121332964 @default.
- W2370605318 hasConcept C127413603 @default.
- W2370605318 hasConcept C147120987 @default.
- W2370605318 hasConcept C165801399 @default.
- W2370605318 hasConcept C192562407 @default.
- W2370605318 hasConcept C2776502983 @default.
- W2370605318 hasConcept C49040817 @default.
- W2370605318 hasConcept C62520636 @default.
- W2370605318 hasConcept C95312477 @default.
- W2370605318 hasConceptScore W2370605318C119599485 @default.
- W2370605318 hasConceptScore W2370605318C120665830 @default.
- W2370605318 hasConceptScore W2370605318C121332964 @default.
- W2370605318 hasConceptScore W2370605318C127413603 @default.
- W2370605318 hasConceptScore W2370605318C147120987 @default.
- W2370605318 hasConceptScore W2370605318C165801399 @default.
- W2370605318 hasConceptScore W2370605318C192562407 @default.
- W2370605318 hasConceptScore W2370605318C2776502983 @default.
- W2370605318 hasConceptScore W2370605318C49040817 @default.
- W2370605318 hasConceptScore W2370605318C62520636 @default.
- W2370605318 hasConceptScore W2370605318C95312477 @default.
- W2370605318 hasLocation W23706053181 @default.
- W2370605318 hasOpenAccess W2370605318 @default.
- W2370605318 hasPrimaryLocation W23706053181 @default.
- W2370605318 hasRelatedWork W1966408411 @default.
- W2370605318 hasRelatedWork W2027337445 @default.
- W2370605318 hasRelatedWork W2038285354 @default.
- W2370605318 hasRelatedWork W2083238592 @default.
- W2370605318 hasRelatedWork W2093907176 @default.
- W2370605318 hasRelatedWork W2168837070 @default.
- W2370605318 hasRelatedWork W2334037502 @default.
- W2370605318 hasRelatedWork W261974811 @default.
- W2370605318 hasRelatedWork W2735551005 @default.
- W2370605318 hasRelatedWork W3036233225 @default.
- W2370605318 hasRelatedWork W3038632081 @default.
- W2370605318 hasRelatedWork W3047152887 @default.
- W2370605318 hasRelatedWork W3113401710 @default.
- W2370605318 hasRelatedWork W3115692302 @default.
- W2370605318 hasRelatedWork W3116697439 @default.
- W2370605318 hasRelatedWork W3122157760 @default.
- W2370605318 hasRelatedWork W3135614417 @default.
- W2370605318 hasRelatedWork W3204054829 @default.
- W2370605318 hasRelatedWork W2986156332 @default.
- W2370605318 isParatext "false" @default.
- W2370605318 isRetracted "false" @default.
- W2370605318 magId "2370605318" @default.
- W2370605318 workType "article" @default.