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- W2370628936 abstract "Rough surface is the obstacle to the application of diamond film. In this paper, orthogonal polishing experiment was designed and the surface roughness was measured to optimize the mechanical polishing parameters for high-efficiency polishing of the diamond film, using self-made mechanical polishing equipment. Experiment results indicate that the factors affecting the polishing efficiency are millstones granularity, speed, pressure and the area. The residual stresses of the diamond film before and after mechanical polishing were measured by X-ray method. The result and analysis indicate mechanical polishing is propitious to reduce the residual tensile stresses." @default.
- W2370628936 created "2016-06-24" @default.
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- W2370628936 date "2004-01-01" @default.
- W2370628936 modified "2023-09-25" @default.
- W2370628936 title "Study on Mechanical Polishing for CVD Diamond Thick Film and Its Residual Stresses" @default.
- W2370628936 hasPublicationYear "2004" @default.
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