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- W2371066949 abstract "A series of hydrogen-free carbon films are prepared and spectroscopic ellipsometry is applied to study them.Sample preparation and measurement,model establishment,multi-sample analysis,ellipsometry data fitting are also discussed.The results show that the thicknesses of the diamond-like carbon films can be determined and the fraction of sp~3 in the diamond-like carbon films has also been obtained.The correlation between the fraction of sp~3 and the biased voltage has been observed." @default.
- W2371066949 created "2016-06-24" @default.
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- W2371066949 date "2005-01-01" @default.
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- W2371066949 title "Ellipsometric Spectrum Study on Diamond-like Carbon Films" @default.
- W2371066949 hasPublicationYear "2005" @default.
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