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- W2371288424 abstract "This paper describes typical structure and fabrication technology of uncooled micro-bolometer infrared focal plane arrays (UMBIRFPA) being researched abroad.The performance para meters of UMBIRFPA are also given." @default.
- W2371288424 created "2016-06-24" @default.
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- W2371288424 date "1998-01-01" @default.
- W2371288424 modified "2023-09-23" @default.
- W2371288424 title "Research development on fabrication technology of silicon-based UMBIRFPA abroad" @default.
- W2371288424 hasPublicationYear "1998" @default.
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