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- W2371345570 abstract "The research activities on non-traditional micromachining technologies to shape microstructures with 3 DOF and to make microstructures with ultimate size are summarized in this paper. Compared with silicon process and LIGA process, the non-traditional micromachining technologies without mask such as stereolithography, micro EDM and micro mechanical machining have got great progress in recent years, which have advantages especially in shaping microstructures with 3 DOF. At the same time, SPM processing technology accelerates miniaturization to ultimate size area. The research and development of micromachining technologies by integrating multidisciplinary novel ideas and advanced technologies will give the possibility for getting much further progress in MEMS/micromachines." @default.
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- W2371345570 title "Overview of non-traditional micromachining technologies" @default.
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