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- W2372193485 abstract "On the basis of research on air-thrust bearings,some results have been applied on a certain wafer stage.In order to assess the applying effect of the air-thrust bearings,the finite element analysis and experimental research on the wafer stage have been carried out.The research results show that the application of the air-thrust bearing applied to the wafer stage is successful and the results of the finite element analysis and experimental research on the former 6-class modes are corresponding,and the maximum error in frequency is not more than 3.4%." @default.
- W2372193485 created "2016-06-24" @default.
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- W2372193485 date "2010-01-01" @default.
- W2372193485 modified "2023-09-27" @default.
- W2372193485 title "The Finite Element Analysis and Experimental Research on Wafer Stage with Air-thrust Bearing" @default.
- W2372193485 hasPublicationYear "2010" @default.
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