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- W2372542602 abstract "Large-area AZO thin films have been deposited on glass substrate by DC magnetron sputtering at 200℃.The effect of sample spatial location on the structural,electrical,optical properties and morphology of the AZO thin films were investigated.It was found that all AZO thin films grow with c-axis orientation of the hexagonal ZnO phase normal to the substrate,the surface of AZO thin films are smooth,and the grain size is around 20nm.The sheet resistance of large-area AZO thin film obtained in the testing is in a range of 86～110Ω/□;change rating of sheet resistance is 28%;resistivity lies in 6.34～7.26×10-4 Ω.cm;the average visible transmittance is higher than 87%." @default.
- W2372542602 created "2016-06-24" @default.
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- W2372542602 date "2010-01-01" @default.
- W2372542602 modified "2023-09-26" @default.
- W2372542602 title "Deposition of large-area AZO thin films by DC magnetron sputtering" @default.
- W2372542602 hasPublicationYear "2010" @default.
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