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- W2372584275 abstract "Aimed at the clamped-clamped beam structure of MEMS devices, standard polynomial controlled sources of SPICE and modal analysis are introduced to build the multi-modal small-signal macromodel of equivalent circuit for the clamped-clamped beam microsensor. Corresponding IP library model is then created. Under the outside force load, the output electrical parameters' characteristic of distributed-parameter clamped-clamped beam microsensor is presented by adopting the IP library and taking system-level simulation including the periphery circuits with SPICE. The resonance frequencies of each modal and related curves of the model are verified with the COVENTORWARE software." @default.
- W2372584275 created "2016-06-24" @default.
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- W2372584275 date "2004-01-01" @default.
- W2372584275 modified "2023-09-25" @default.
- W2372584275 title "Creation of the Macromodel of Equivalent Circuit and IP Library for Clamped-Clamped Beam Microsensor" @default.
- W2372584275 hasPublicationYear "2004" @default.
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