Matches in SemOpenAlex for { <https://semopenalex.org/work/W2372682103> ?p ?o ?g. }
Showing items 1 to 67 of
67
with 100 items per page.
- W2372682103 abstract "A series of N-type a-Si:H films were prepared by a plasma enhanced chemical vapor deposition method at different PH3/SiH4-doped flow ratios. The N-type a-Si:H film with the optimal PH3/SiH4 flow ratio was annealed in vacuum. The influence of PH3/SiH4 flow ratio on the microstructures and properties of a-Si:H films was investigated. The results indicate that the microstructure of N type a-Si:H films has no substantial change, but the electrical properties improves when PH3/SiH4 flow ratio increases. The a-Si:H film sample prepared at an optimal PH3/SiH4 flow ratio of 1.5%. The order degree of the film after vacuum annealing increases. The resistivity of the film after annealing is decreased by 3 orders of magnitude. The annealing treatment of the film has an influence on the crystal structure, thus improving the electrical properties of the film." @default.
- W2372682103 created "2016-06-24" @default.
- W2372682103 creator A5012299581 @default.
- W2372682103 date "2013-01-01" @default.
- W2372682103 modified "2023-09-26" @default.
- W2372682103 title "Effect of PH_3/SiH_4 Gas Flow Ratio on Microstructures and Electrical Properties of N-type a-Si:H Films" @default.
- W2372682103 hasPublicationYear "2013" @default.
- W2372682103 type Work @default.
- W2372682103 sameAs 2372682103 @default.
- W2372682103 citedByCount "0" @default.
- W2372682103 crossrefType "journal-article" @default.
- W2372682103 hasAuthorship W2372682103A5012299581 @default.
- W2372682103 hasConcept C113196181 @default.
- W2372682103 hasConcept C119599485 @default.
- W2372682103 hasConcept C127413603 @default.
- W2372682103 hasConcept C159985019 @default.
- W2372682103 hasConcept C171250308 @default.
- W2372682103 hasConcept C185592680 @default.
- W2372682103 hasConcept C192562407 @default.
- W2372682103 hasConcept C2777855556 @default.
- W2372682103 hasConcept C43617362 @default.
- W2372682103 hasConcept C49040817 @default.
- W2372682103 hasConcept C57410435 @default.
- W2372682103 hasConcept C57863236 @default.
- W2372682103 hasConcept C69990965 @default.
- W2372682103 hasConcept C87976508 @default.
- W2372682103 hasConceptScore W2372682103C113196181 @default.
- W2372682103 hasConceptScore W2372682103C119599485 @default.
- W2372682103 hasConceptScore W2372682103C127413603 @default.
- W2372682103 hasConceptScore W2372682103C159985019 @default.
- W2372682103 hasConceptScore W2372682103C171250308 @default.
- W2372682103 hasConceptScore W2372682103C185592680 @default.
- W2372682103 hasConceptScore W2372682103C192562407 @default.
- W2372682103 hasConceptScore W2372682103C2777855556 @default.
- W2372682103 hasConceptScore W2372682103C43617362 @default.
- W2372682103 hasConceptScore W2372682103C49040817 @default.
- W2372682103 hasConceptScore W2372682103C57410435 @default.
- W2372682103 hasConceptScore W2372682103C57863236 @default.
- W2372682103 hasConceptScore W2372682103C69990965 @default.
- W2372682103 hasConceptScore W2372682103C87976508 @default.
- W2372682103 hasLocation W23726821031 @default.
- W2372682103 hasOpenAccess W2372682103 @default.
- W2372682103 hasPrimaryLocation W23726821031 @default.
- W2372682103 hasRelatedWork W1964203277 @default.
- W2372682103 hasRelatedWork W1973163381 @default.
- W2372682103 hasRelatedWork W1974737824 @default.
- W2372682103 hasRelatedWork W1976600949 @default.
- W2372682103 hasRelatedWork W1984505747 @default.
- W2372682103 hasRelatedWork W2009810160 @default.
- W2372682103 hasRelatedWork W2038300207 @default.
- W2372682103 hasRelatedWork W2040462345 @default.
- W2372682103 hasRelatedWork W2044197651 @default.
- W2372682103 hasRelatedWork W2044446705 @default.
- W2372682103 hasRelatedWork W2067098246 @default.
- W2372682103 hasRelatedWork W2071130135 @default.
- W2372682103 hasRelatedWork W2109149365 @default.
- W2372682103 hasRelatedWork W2116424363 @default.
- W2372682103 hasRelatedWork W2154567258 @default.
- W2372682103 hasRelatedWork W2157878545 @default.
- W2372682103 hasRelatedWork W2313227099 @default.
- W2372682103 hasRelatedWork W2315112045 @default.
- W2372682103 hasRelatedWork W2476751301 @default.
- W2372682103 hasRelatedWork W3146858644 @default.
- W2372682103 isParatext "false" @default.
- W2372682103 isRetracted "false" @default.
- W2372682103 magId "2372682103" @default.
- W2372682103 workType "article" @default.