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- W2372685564 abstract "CMP used in copper Damascene process make metal thickness variability through full-chip severely because of pattern dependant within die.For accurate interconnect metric in 90nm process,we propose a novel method which can implement statistical analysis for the impact of metal thickness variation in CMP efficiently,by modeling interconnect with the parasitical parameters' means and standard deviations extracted from TCAD.Experiment shows the method is very practical interconnect simulation in 90nm process." @default.
- W2372685564 created "2016-06-24" @default.
- W2372685564 creator A5039163297 @default.
- W2372685564 date "2009-01-01" @default.
- W2372685564 modified "2023-09-23" @default.
- W2372685564 title "A 90nm Process Interconnect Statistical Analysis for Metal Thickness Variation in CMP" @default.
- W2372685564 hasPublicationYear "2009" @default.
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