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- W2372704258 abstract "The complete course that ions leave the source region, pass through the neutral region and the sheath and are finally absorbed by the face of the target with negative bias in an ECR microwave plasma, is simulated by using the Monte Carlo method. Ion neutral charge exchange and elastic scattering are taken into account. We have studied the joint of the neutral region and the sheath at the sheath edge and obtained the distributions of velocity, energy and angle at any point of the sheath. The effect of magnetic field on the sheath potential is discussed." @default.
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- W2372704258 date "1997-01-01" @default.
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- W2372704258 title "A Monte Carlo simulation of ion transport in ECR microwave plasma" @default.
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