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- W2372854454 abstract "The design of antireflection was taken by using the combined films of amorphous diamond(α-D) and amorphous hydrogenated germanium carbide(α-Ge_(1-x)C_x:H) according to the fundamental theories of the optical interference coatings.The α-Ge_(1-x)C_x:H films,of which refractive index was adjusted by changing the methane flow rate ratio and its thickness was determined by the flow rate ratio and deposition time,were deposited by radio-frequency sputtering technology.The α-D films,of which refractive index was regulated by changing the substrate bias and its thickness was controlled by changing deposition time,were deposited by the filtered cathodic vacuum arc technology.The refractive index and film thickness were respectively measured by spectroscopic ellipsometry and surface profiler.The density of a-D films was characterized by XRR and the Ge content was examined by XPS.The hardness and infrared transmittance of the films were respectively evaluated by nano-indenter and FTIR.It has been shown that the combined α-D and α-Ge_(1-x)C_x:H films,of which refractive index was respectively correlated with the density and the Ge content,can be used to fabricate excellent antireflective and protective coatings for ZnS optical elements." @default.
- W2372854454 created "2016-06-24" @default.
- W2372854454 creator A5083688078 @default.
- W2372854454 date "2006-01-01" @default.
- W2372854454 modified "2023-09-25" @default.
- W2372854454 title "DESIGN AND REALIZATION OF THE COMBINED AMORPHOUS DIAMOND AND AMORPHOUS GERMANIUM CARBIDE FILMS AS ANTIREFLECTIVE AND PROTECTIVE COATINGS" @default.
- W2372854454 hasPublicationYear "2006" @default.
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