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- W2372914963 abstract "The analysis of contact pairs and opposite movement of moving elements about surface-micromachined MEMS are given in this paper. The source and mechanism of tribology is discussed on this kind of MEMS. Considering the developing history of Macro-machine, the specialities and existing problems of the tribology concerned to MEMS are pointed out." @default.
- W2372914963 created "2016-06-24" @default.
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- W2372914963 date "2002-01-01" @default.
- W2372914963 modified "2023-09-26" @default.
- W2372914963 title "Tribological Problems of Surface-Micromachined MEMS" @default.
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