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- W2372937566 abstract "The ion plating is a new technique combined vacuum evaporation plating with sputtering. In this paper we principally investigate how the compositions of an indium and tin evaporant affect an physical properties of a transparent and conductive thin film of indiamtin oxide.It has been concluded that the transparent and conducting thin film with high transparence and conductivity can be obtained with the help of a reactive ion plating technique if the component of evaporant and oxygenation pressure are chosen appropriately." @default.
- W2372937566 created "2016-06-24" @default.
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- W2372937566 date "1984-01-01" @default.
- W2372937566 modified "2023-09-25" @default.
- W2372937566 title "PHYSICAL PROPERTIES OF INDIUM TIN OXIDE TRANSPARENT CONUCTING THIN FILMS BY REACTIVE ION PLATING" @default.
- W2372937566 hasPublicationYear "1984" @default.
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