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- W2373194625 abstract "The preparation of SRO thin film on(001)LAO by inverted cylindrical DC sputtering,and research on the effects of substrate temperature and sputtering atmosphere on orientation and surface morphology of thin film are given.The experimental results indicate that high quality and surface smooth with110orientated SRO can be grown at deposition temperature 720 ℃ and PAr∶PO2=4∶1." @default.
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- W2373194625 date "2005-01-01" @default.
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- W2373194625 title "Growth of SRO Thin Film by Inverted Cylindrical DC Sputtering" @default.
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