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- W2373250673 abstract "Barium strontium titanate (BST) thin films were deposited on Pt/Ti/SiO_2/Si substrates by RF magnetron sputtering.Depth profile of BST/Pt/Ti/SiO_2 structure was characterized by X-ray photoelectron spectrum (XPS). The results show that the variations in the composition of the bulk dielectric film are relatively slight and the concentration of oxygen vacancy in the surface is lower than that in the bulk. It is also found that Pt diffuses from bottom electrode to BST film and substrate. That is to say, there are transitional layers at the film/electrode and electrode/substrate interfaces." @default.
- W2373250673 created "2016-06-24" @default.
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- W2373250673 date "2005-01-01" @default.
- W2373250673 modified "2023-09-25" @default.
- W2373250673 title "XPS Analysis of Barium Strontium Titanate (BST) Thin Film" @default.
- W2373250673 hasPublicationYear "2005" @default.
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