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• W2373281726 abstract "The basic principle of fabricating nanometer patterns by controlling neutral atoms is introduced in this paper. Against the actual experiment system , a CCD microscope used for the samples generated by atom lithography in high vacuum system is designed and built up . With CCD camera sampling at real-time , the apparatus directly displays and provides the data of microstructure on the sample surface through automatic image processing by computer. Compared with the traditional method, it increases a function for adjusting the technological parameters at real-time during the experiment." @default.
• W2373281726 created "2016-06-24" @default.
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• W2373281726 date "2003-01-01" @default.
• W2373281726 modified "2023-09-26" @default.
• W2373281726 title "The CCD microscope used for the samples generated by atom lithography in high vacuum system" @default.
• W2373281726 hasPublicationYear "2003" @default.
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