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- W2373368505 abstract "A novel microforce sensor with microcantilever structure based on PT/PZT/PT piezoelectric thin films is proposed.The PT and PZT thin films are fabricated using Sol-Gel method.The PZT thin film and the PT/PZT/PT thin film are investigated using X-ray diffractometry.The measured dielectric constants of the thin films show that both thin films have pure perovskite tetragonal structure and the PT/PZT/PT thin film orients in pervoskite(100) strongly at the same anneal temperature of 600 ℃.The dielectric constants of the PZT thin film and the PT/PZT/PT thin film are 525 and 981 at 1 kHz,respectively.Finally,the microforce sensors are fabricated using MEMS techniques and the sensing properties of microforce sensor are measured in static state and quasi-static state.The results show that it has good linearity between force and deflection or charge.The sensitivities of two kinds of size microforce sensors are 0.045 mV/μN and 0.007 mV/μN in quasi-static state with resolution of 3.7 μN and 16.9 μN,respectively.The measurement of microforce can satisfy the need of micro-Newton level." @default.
- W2373368505 created "2016-06-24" @default.
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- W2373368505 date "2007-01-01" @default.
- W2373368505 modified "2023-09-25" @default.
- W2373368505 title "Microforce sensors based on PT/PZT/PT thin films" @default.
- W2373368505 hasPublicationYear "2007" @default.
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