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- W2373489111 abstract "MEMS(micro electromechanical system) technology is an emerging technology. It is taken more and more seriously both inside and outside the country. In this paper, background, research, characteristic and developing status of MEMS technology are introduced summarily. Trend is analyzed." @default.
- W2373489111 created "2016-06-24" @default.
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- W2373489111 date "2001-01-01" @default.
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- W2373489111 title "Developing status and trend of MEMS technology" @default.
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