Matches in SemOpenAlex for { <https://semopenalex.org/work/W2373597744> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W2373597744 abstract "A model has been established for indicating the relations between discharge power, pressure and ion beam flux density in the circular unbalanced magnetron system. The transportation of the ions and one of the neutral particles were separately discussed in the model. The influence of the discharge current density and pressure is discussed through the analytical model on axial ion flux density in system. The model indicates the relation between axial ion flux density and discharge parameters such as the discharge pressure, target-substrate distance and sputter current density. The experimental results are approximately in conformity with the simulation results." @default.
- W2373597744 created "2016-06-24" @default.
- W2373597744 creator A5067563533 @default.
- W2373597744 date "2004-01-01" @default.
- W2373597744 modified "2023-09-23" @default.
- W2373597744 title "Axial ion flux control in unbalanced magnetron sputtering system" @default.
- W2373597744 hasPublicationYear "2004" @default.
- W2373597744 type Work @default.
- W2373597744 sameAs 2373597744 @default.
- W2373597744 citedByCount "0" @default.
- W2373597744 crossrefType "journal-article" @default.
- W2373597744 hasAuthorship W2373597744A5067563533 @default.
- W2373597744 hasConcept C121332964 @default.
- W2373597744 hasConcept C123408415 @default.
- W2373597744 hasConcept C145148216 @default.
- W2373597744 hasConcept C163258240 @default.
- W2373597744 hasConcept C171250308 @default.
- W2373597744 hasConcept C184779094 @default.
- W2373597744 hasConcept C185544564 @default.
- W2373597744 hasConcept C19067145 @default.
- W2373597744 hasConcept C191897082 @default.
- W2373597744 hasConcept C192562407 @default.
- W2373597744 hasConcept C207740977 @default.
- W2373597744 hasConcept C21881925 @default.
- W2373597744 hasConcept C22423302 @default.
- W2373597744 hasConcept C2778220808 @default.
- W2373597744 hasConcept C61427134 @default.
- W2373597744 hasConcept C62520636 @default.
- W2373597744 hasConcept C68709404 @default.
- W2373597744 hasConcept C82706917 @default.
- W2373597744 hasConcept C97355855 @default.
- W2373597744 hasConceptScore W2373597744C121332964 @default.
- W2373597744 hasConceptScore W2373597744C123408415 @default.
- W2373597744 hasConceptScore W2373597744C145148216 @default.
- W2373597744 hasConceptScore W2373597744C163258240 @default.
- W2373597744 hasConceptScore W2373597744C171250308 @default.
- W2373597744 hasConceptScore W2373597744C184779094 @default.
- W2373597744 hasConceptScore W2373597744C185544564 @default.
- W2373597744 hasConceptScore W2373597744C19067145 @default.
- W2373597744 hasConceptScore W2373597744C191897082 @default.
- W2373597744 hasConceptScore W2373597744C192562407 @default.
- W2373597744 hasConceptScore W2373597744C207740977 @default.
- W2373597744 hasConceptScore W2373597744C21881925 @default.
- W2373597744 hasConceptScore W2373597744C22423302 @default.
- W2373597744 hasConceptScore W2373597744C2778220808 @default.
- W2373597744 hasConceptScore W2373597744C61427134 @default.
- W2373597744 hasConceptScore W2373597744C62520636 @default.
- W2373597744 hasConceptScore W2373597744C68709404 @default.
- W2373597744 hasConceptScore W2373597744C82706917 @default.
- W2373597744 hasConceptScore W2373597744C97355855 @default.
- W2373597744 hasLocation W23735977441 @default.
- W2373597744 hasOpenAccess W2373597744 @default.
- W2373597744 hasPrimaryLocation W23735977441 @default.
- W2373597744 hasRelatedWork W1639626114 @default.
- W2373597744 hasRelatedWork W1819427374 @default.
- W2373597744 hasRelatedWork W1917749317 @default.
- W2373597744 hasRelatedWork W1998173689 @default.
- W2373597744 hasRelatedWork W2007290463 @default.
- W2373597744 hasRelatedWork W2051501148 @default.
- W2373597744 hasRelatedWork W2057346748 @default.
- W2373597744 hasRelatedWork W2070235464 @default.
- W2373597744 hasRelatedWork W2070492069 @default.
- W2373597744 hasRelatedWork W2084688569 @default.
- W2373597744 hasRelatedWork W2088224063 @default.
- W2373597744 hasRelatedWork W2093247190 @default.
- W2373597744 hasRelatedWork W2121083836 @default.
- W2373597744 hasRelatedWork W2167038982 @default.
- W2373597744 hasRelatedWork W2169253480 @default.
- W2373597744 hasRelatedWork W2368601166 @default.
- W2373597744 hasRelatedWork W2515438965 @default.
- W2373597744 hasRelatedWork W2531614833 @default.
- W2373597744 hasRelatedWork W2591181340 @default.
- W2373597744 hasRelatedWork W3102858149 @default.
- W2373597744 isParatext "false" @default.
- W2373597744 isRetracted "false" @default.
- W2373597744 magId "2373597744" @default.
- W2373597744 workType "article" @default.