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- W2373793914 abstract "Based on the analysis of advantages and disadvantages of piezoresistive,capacitive and resonant silicon pressure sensors and review of their low-pressure-orientation research progresses,capacitive structure was determined for the preliminary structure of silicon ultra-low pressure sensor,whose full scale output is 100Pa. Aiming at the difficulties of design: manufacture of ultra-flat and ultra-thin diaphragm,gain and maintenance of high vacuum reference chamber,electrode lead from high vacuum reference chamber and detection of micro capacitor. All these work laid a solid foundation for the following manufacture." @default.
- W2373793914 created "2016-06-24" @default.
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- W2373793914 date "2007-01-01" @default.
- W2373793914 modified "2023-09-23" @default.
- W2373793914 title "Design research of silicon ultra-low-pressure sensor" @default.
- W2373793914 hasPublicationYear "2007" @default.
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