Matches in SemOpenAlex for { <https://semopenalex.org/work/W2374008616> ?p ?o ?g. }
Showing items 1 to 69 of
69
with 100 items per page.
- W2374008616 abstract "The PZT piezoelectric thin films was deposited on silicon substrates by using sol-gel techniques. The PZT thin films was used to fabricate valveless microactuator by its piezoelectric response. As the key structure of microactuator, the preparation of multi-layer driving membrane and etching of PZT thin films were discussed. The multi-layer driving membrane structure for the Si /SiO2/Ti /Pt /PZT/Cr/Au solved the questions of adhesion, anti-fatigue in the preparation of thin film, and the BHF/HNO solution realized PZT thin film etching technology in semiconductor processing steps. The important effect of temperature and concentration of solution on etching technology were also studied and the best technology condition of si anisotropic etching was given. Using the above method, the key technology problems of integrated fabricating valveless microactuator were solved and complexity of the device was degraded. There are many merits to use this methods such as large area, uniform and flat in silicon cup and the microactuator life was improved due to no move parts." @default.
- W2374008616 created "2016-06-24" @default.
- W2374008616 creator A5017510323 @default.
- W2374008616 date "2005-01-01" @default.
- W2374008616 modified "2023-09-25" @default.
- W2374008616 title "Process research of microactuator with PZT preparedby sol-gel" @default.
- W2374008616 hasPublicationYear "2005" @default.
- W2374008616 type Work @default.
- W2374008616 sameAs 2374008616 @default.
- W2374008616 citedByCount "0" @default.
- W2374008616 crossrefType "journal-article" @default.
- W2374008616 hasAuthorship W2374008616A5017510323 @default.
- W2374008616 hasConcept C100082104 @default.
- W2374008616 hasConcept C100460472 @default.
- W2374008616 hasConcept C119599485 @default.
- W2374008616 hasConcept C127413603 @default.
- W2374008616 hasConcept C151054161 @default.
- W2374008616 hasConcept C159985019 @default.
- W2374008616 hasConcept C171250308 @default.
- W2374008616 hasConcept C172707124 @default.
- W2374008616 hasConcept C19067145 @default.
- W2374008616 hasConcept C192562407 @default.
- W2374008616 hasConcept C24326235 @default.
- W2374008616 hasConcept C2779227376 @default.
- W2374008616 hasConcept C49040817 @default.
- W2374008616 hasConcept C544956773 @default.
- W2374008616 hasConcept C58373989 @default.
- W2374008616 hasConceptScore W2374008616C100082104 @default.
- W2374008616 hasConceptScore W2374008616C100460472 @default.
- W2374008616 hasConceptScore W2374008616C119599485 @default.
- W2374008616 hasConceptScore W2374008616C127413603 @default.
- W2374008616 hasConceptScore W2374008616C151054161 @default.
- W2374008616 hasConceptScore W2374008616C159985019 @default.
- W2374008616 hasConceptScore W2374008616C171250308 @default.
- W2374008616 hasConceptScore W2374008616C172707124 @default.
- W2374008616 hasConceptScore W2374008616C19067145 @default.
- W2374008616 hasConceptScore W2374008616C192562407 @default.
- W2374008616 hasConceptScore W2374008616C24326235 @default.
- W2374008616 hasConceptScore W2374008616C2779227376 @default.
- W2374008616 hasConceptScore W2374008616C49040817 @default.
- W2374008616 hasConceptScore W2374008616C544956773 @default.
- W2374008616 hasConceptScore W2374008616C58373989 @default.
- W2374008616 hasLocation W23740086161 @default.
- W2374008616 hasOpenAccess W2374008616 @default.
- W2374008616 hasPrimaryLocation W23740086161 @default.
- W2374008616 hasRelatedWork W1977896860 @default.
- W2374008616 hasRelatedWork W1992824199 @default.
- W2374008616 hasRelatedWork W1992937992 @default.
- W2374008616 hasRelatedWork W2034376987 @default.
- W2374008616 hasRelatedWork W2056040496 @default.
- W2374008616 hasRelatedWork W2063568920 @default.
- W2374008616 hasRelatedWork W2073051480 @default.
- W2374008616 hasRelatedWork W2123168125 @default.
- W2374008616 hasRelatedWork W2176958940 @default.
- W2374008616 hasRelatedWork W2291793299 @default.
- W2374008616 hasRelatedWork W2327100644 @default.
- W2374008616 hasRelatedWork W2361205979 @default.
- W2374008616 hasRelatedWork W2361277176 @default.
- W2374008616 hasRelatedWork W2370155396 @default.
- W2374008616 hasRelatedWork W2384315721 @default.
- W2374008616 hasRelatedWork W2392206345 @default.
- W2374008616 hasRelatedWork W2539249812 @default.
- W2374008616 hasRelatedWork W2750076224 @default.
- W2374008616 hasRelatedWork W2928514528 @default.
- W2374008616 hasRelatedWork W3107006482 @default.
- W2374008616 isParatext "false" @default.
- W2374008616 isRetracted "false" @default.
- W2374008616 magId "2374008616" @default.
- W2374008616 workType "article" @default.