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- W2374443609 abstract "In this paper,the effect of hydrogen anneal on thermal donors(TDs) and N-O complexes in N-doped Cz wafer were investigated.The experimental result indicates that the generation of TDs and N-O complexes anaealed in hydrogen ambience is almost the same as those annealed in argon ambience.It is inferred that the concentration of hydrogen implanted in silicon by hydrogen anneal at low temperature is too low to effect the resistivity of silicon obviously." @default.
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- W2374443609 date "2003-01-01" @default.
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- W2374443609 title "Effect of Hydrogen Anneal on Electric Behavior in NCZ Silicon" @default.
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