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- W2374846422 abstract "Recent development of the international mainstream lithographic tools for 65 nm and 45 nm processes is described The key technologies to improve performance of lithographic tools are analyzed. The dominating types of lithographic tools as well as their performame parameters are reviewed. Development status of the next generation lithography is discussed briefly." @default.
- W2374846422 created "2016-06-24" @default.
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- W2374846422 date "2007-01-01" @default.
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- W2374846422 title "Recent Development of International Mainstream Lithographic Tools" @default.
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