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- W2374988675 abstract "The spray etcher control system for power semiconductor etching process was introduced;and the network topology map was presented to construct multi-network system based on MPI and Profibus and PLC network communication theory.Through creating links and network communication programming,the auto-control of high-precision spray etcher can be implemented to satisfy power semiconductor in Si/AL layer-etching process." @default.
- W2374988675 created "2016-06-24" @default.
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- W2374988675 date "2013-01-01" @default.
- W2374988675 modified "2023-09-24" @default.
- W2374988675 title "Study of Spray Etcher Control System Based on PLC Network Communication" @default.
- W2374988675 hasPublicationYear "2013" @default.
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