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- W2375240529 abstract "Nanofabrication by scanning probe microscope (SPM) is a promising fabrication approach, and it can produce functional nanodevices and nanoscale mechanical structures.Some necessary improvements are completed to make the commercial SPM suitable to the nanofabrication process. This paper shows the possibility of developing a nanofabrication system on the basis of our Multimode SPM.A set of methods are provided,including signal application, process monitor and environment control to realize the nanoscale fabrication in vector style. We can fabricate 30nm wide nanostructures to support our further study on the nanoscale electronic devices." @default.
- W2375240529 created "2016-06-24" @default.
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- W2375240529 date "2003-01-01" @default.
- W2375240529 modified "2023-09-24" @default.
- W2375240529 title "Development of SPM Nanofabrication System in Air" @default.
- W2375240529 hasPublicationYear "2003" @default.
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