FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2375330958> ?p ?o ?g. }

• W2375330958 abstract "Reactive co-sputtering method for growth of sub-nm equivalent oxide thickness(EOT) HfTiO high κ gate dielectric on Ge substrate and the effects of wet or dry N2annealing on dielectric performances are analyzed.Measuring by transmission-electron microscopy,ellipsometry,X-ray photoelectron spectroscopy,atomic force microscopy and electrical properties indicate that,as compared to dry N2 annealing,the wet N2 annealing can greatly suppress the growth of unstable low-κ GeOx interlayer,resulting in smaller oxide thickness and surface roughness,thus increasing permittity,improving interface quality and gate leakage current.All these are attributed to the hydrolysable property of of GeOx in water-vapor-ambient.Impacts of sputtering power of Ti target on Ge MOS characteristic are investigated too." @default.
• W2375330958 created "2016-06-24" @default.
• W2375330958 creator A5044914665 @default.
• W2375330958 date "2008-01-01" @default.
• W2375330958 modified "2023-09-23" @default.
• W2375330958 title "Study on Characteristics of Ge MOS Capacitor with HfTiO High κ Gate Dielectric" @default.
• W2375330958 hasPublicationYear "2008" @default.
• W2375330958 type Work @default.
• W2375330958 sameAs 2375330958 @default.
• W2375330958 citedByCount "0" @default.
• W2375330958 crossrefType "journal-article" @default.
• W2375330958 hasAuthorship W2375330958A5044914665 @default.
• W2375330958 hasConcept C107365816 @default.
• W2375330958 hasConcept C113196181 @default.
• W2375330958 hasConcept C119599485 @default.
• W2375330958 hasConcept C127413603 @default.
• W2375330958 hasConcept C133386390 @default.
• W2375330958 hasConcept C139719470 @default.
• W2375330958 hasConcept C146088050 @default.
• W2375330958 hasConcept C159985019 @default.
• W2375330958 hasConcept C162324750 @default.
• W2375330958 hasConcept C16317505 @default.
• W2375330958 hasConcept C165801399 @default.
• W2375330958 hasConcept C166972891 @default.
• W2375330958 hasConcept C171250308 @default.
• W2375330958 hasConcept C172385210 @default.
• W2375330958 hasConcept C175708663 @default.
• W2375330958 hasConcept C18293161 @default.
• W2375330958 hasConcept C185592680 @default.
• W2375330958 hasConcept C19067145 @default.
• W2375330958 hasConcept C191897082 @default.
• W2375330958 hasConcept C192562407 @default.
• W2375330958 hasConcept C22423302 @default.
• W2375330958 hasConcept C2361726 @default.
• W2375330958 hasConcept C2777042071 @default.
• W2375330958 hasConcept C2777855556 @default.
• W2375330958 hasConcept C2779851234 @default.
• W2375330958 hasConcept C42360764 @default.
• W2375330958 hasConcept C43617362 @default.
• W2375330958 hasConcept C49040817 @default.
• W2375330958 hasConcept C52192207 @default.
• W2375330958 hasConcept C52780932 @default.
• W2375330958 hasConcept C71039073 @default.
• W2375330958 hasConceptScore W2375330958C107365816 @default.
• W2375330958 hasConceptScore W2375330958C113196181 @default.
• W2375330958 hasConceptScore W2375330958C119599485 @default.
• W2375330958 hasConceptScore W2375330958C127413603 @default.
• W2375330958 hasConceptScore W2375330958C133386390 @default.
• W2375330958 hasConceptScore W2375330958C139719470 @default.
• W2375330958 hasConceptScore W2375330958C146088050 @default.
• W2375330958 hasConceptScore W2375330958C159985019 @default.
• W2375330958 hasConceptScore W2375330958C162324750 @default.
• W2375330958 hasConceptScore W2375330958C16317505 @default.
• W2375330958 hasConceptScore W2375330958C165801399 @default.
• W2375330958 hasConceptScore W2375330958C166972891 @default.
• W2375330958 hasConceptScore W2375330958C171250308 @default.
• W2375330958 hasConceptScore W2375330958C172385210 @default.
• W2375330958 hasConceptScore W2375330958C175708663 @default.
• W2375330958 hasConceptScore W2375330958C18293161 @default.
• W2375330958 hasConceptScore W2375330958C185592680 @default.
• W2375330958 hasConceptScore W2375330958C19067145 @default.
• W2375330958 hasConceptScore W2375330958C191897082 @default.
• W2375330958 hasConceptScore W2375330958C192562407 @default.
• W2375330958 hasConceptScore W2375330958C22423302 @default.
• W2375330958 hasConceptScore W2375330958C2361726 @default.
• W2375330958 hasConceptScore W2375330958C2777042071 @default.
• W2375330958 hasConceptScore W2375330958C2777855556 @default.
• W2375330958 hasConceptScore W2375330958C2779851234 @default.
• W2375330958 hasConceptScore W2375330958C42360764 @default.
• W2375330958 hasConceptScore W2375330958C43617362 @default.
• W2375330958 hasConceptScore W2375330958C49040817 @default.
• W2375330958 hasConceptScore W2375330958C52192207 @default.
• W2375330958 hasConceptScore W2375330958C52780932 @default.
• W2375330958 hasConceptScore W2375330958C71039073 @default.
• W2375330958 hasLocation W23753309581 @default.
• W2375330958 hasOpenAccess W2375330958 @default.
• W2375330958 hasPrimaryLocation W23753309581 @default.
• W2375330958 hasRelatedWork W1977525553 @default.
• W2375330958 hasRelatedWork W2006169333 @default.
• W2375330958 hasRelatedWork W2067644473 @default.
• W2375330958 hasRelatedWork W2077809266 @default.
• W2375330958 hasRelatedWork W2080863887 @default.
• W2375330958 hasRelatedWork W2081929162 @default.
• W2375330958 hasRelatedWork W2089874249 @default.
• W2375330958 hasRelatedWork W2112366909 @default.
• W2375330958 hasRelatedWork W2152448644 @default.
• W2375330958 hasRelatedWork W2354139362 @default.
• W2375330958 hasRelatedWork W2354498147 @default.
• W2375330958 hasRelatedWork W2380434422 @default.
• W2375330958 hasRelatedWork W2391403477 @default.
• W2375330958 hasRelatedWork W2605500734 @default.
• W2375330958 hasRelatedWork W2775020835 @default.
• W2375330958 hasRelatedWork W2965634037 @default.
• W2375330958 hasRelatedWork W3147868917 @default.
• W2375330958 hasRelatedWork W3196633668 @default.
• W2375330958 hasRelatedWork W825836105 @default.
• W2375330958 hasRelatedWork W2916227148 @default.
• W2375330958 isParatext "false" @default.
• W2375330958 isRetracted "false" @default.
• W2375330958 magId "2375330958" @default.

• next