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- W2375451388 abstract "A kind of micromechanical thermopile infrared detector that compatible with CMOS process is proposed,which has higher responsivity and lower noise.The detector,whose absorption layer material is TiN,has two pair of thermopiles with P/N polysilicon as the thermopiles material.The resonant cavity is introduced to improve the infrared absorption,while the noise is reduced by the decrease of thermopiles.The basic principle is provided,important performance parameters are obtained by simulation,and fabrication process of the detector is analyzed.The size of the device is optimized.Theoretically,the responsivity can be larger than 1000 V/W,detectivity is larger than 2×108 cmHz1/2W-1,time constant value is smaller than 20 ms,noise equivalent temperature difference is smaller than 30 mK and value of the resistance is smaller than 20 kΩ." @default.
- W2375451388 created "2016-06-24" @default.
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- W2375451388 date "2012-01-01" @default.
- W2375451388 modified "2023-09-28" @default.
- W2375451388 title "Design of Micromechanical Thermopile Infrared Detector Compatible with CMOS Process" @default.
- W2375451388 hasPublicationYear "2012" @default.
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