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- W2375757172 abstract "The Cu fims with different electrodeposited conditions,substrates and thickness were electrodeposited in sulphate electrolyte.The texture coefficient and preferred orientation of Cu film were investigated by XRD(X-ray diffraction).The texture coefficient condition of DC plating and pulse plating with additive or not were compared.The results show that for the 1 μm Cu film obtained at different conditions presents(111) preferred orientation in most cases,which would be propitious to interconnect in ULSI for its good properties in electromigration resistance." @default.
- W2375757172 created "2016-06-24" @default.
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- W2375757172 date "2008-01-01" @default.
- W2375757172 modified "2023-09-23" @default.
- W2375757172 title "XRD Study on Cu Layer in IC Interconnect" @default.
- W2375757172 hasPublicationYear "2008" @default.
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