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- W2375883983 abstract "According to the theories of thin film calculation and optimization, a new global optimization method for multilayer film thickness calculation is presented. Firstly, a new group of local optimums is found out through genetic and mutation operation. Then, the solutions are accepted at a certain probability and will be calculated respectively in Adapted Simulated Annealing (ASA) process as the initial solutions. At last, conjugate gradient algorithm is utilized to search accurately and quickly. This genetic simulated annealing algorithm can effectively enhance the robustness of the algorithm and reduce the limitation of the searching area. The experimental results show that the proposed algorithm can calculate the thickness of 3-layer and 4-layer thin film within the range of 10 nm~5 μm and less than 1% calculation error." @default.
- W2375883983 created "2016-06-24" @default.
- W2375883983 creator A5058392203 @default.
- W2375883983 date "2010-01-01" @default.
- W2375883983 modified "2023-09-24" @default.
- W2375883983 title "Multilayer Film Thickness Measurement Based on Genetic Simulated Annealing Algorithm" @default.
- W2375883983 hasPublicationYear "2010" @default.
- W2375883983 type Work @default.
- W2375883983 sameAs 2375883983 @default.
- W2375883983 citedByCount "0" @default.
- W2375883983 crossrefType "journal-article" @default.
- W2375883983 hasAuthorship W2375883983A5058392203 @default.
- W2375883983 hasConcept C104317684 @default.
- W2375883983 hasConcept C11413529 @default.
- W2375883983 hasConcept C119857082 @default.
- W2375883983 hasConcept C126980161 @default.
- W2375883983 hasConcept C159985019 @default.
- W2375883983 hasConcept C171250308 @default.
- W2375883983 hasConcept C185592680 @default.
- W2375883983 hasConcept C19067145 @default.
- W2375883983 hasConcept C192562407 @default.
- W2375883983 hasConcept C2777855556 @default.
- W2375883983 hasConcept C41008148 @default.
- W2375883983 hasConcept C46714192 @default.
- W2375883983 hasConcept C55493867 @default.
- W2375883983 hasConcept C63479239 @default.
- W2375883983 hasConcept C81184566 @default.
- W2375883983 hasConcept C8880873 @default.
- W2375883983 hasConceptScore W2375883983C104317684 @default.
- W2375883983 hasConceptScore W2375883983C11413529 @default.
- W2375883983 hasConceptScore W2375883983C119857082 @default.
- W2375883983 hasConceptScore W2375883983C126980161 @default.
- W2375883983 hasConceptScore W2375883983C159985019 @default.
- W2375883983 hasConceptScore W2375883983C171250308 @default.
- W2375883983 hasConceptScore W2375883983C185592680 @default.
- W2375883983 hasConceptScore W2375883983C19067145 @default.
- W2375883983 hasConceptScore W2375883983C192562407 @default.
- W2375883983 hasConceptScore W2375883983C2777855556 @default.
- W2375883983 hasConceptScore W2375883983C41008148 @default.
- W2375883983 hasConceptScore W2375883983C46714192 @default.
- W2375883983 hasConceptScore W2375883983C55493867 @default.
- W2375883983 hasConceptScore W2375883983C63479239 @default.
- W2375883983 hasConceptScore W2375883983C81184566 @default.
- W2375883983 hasConceptScore W2375883983C8880873 @default.
- W2375883983 hasLocation W23758839831 @default.
- W2375883983 hasOpenAccess W2375883983 @default.
- W2375883983 hasPrimaryLocation W23758839831 @default.
- W2375883983 hasRelatedWork W1488569537 @default.
- W2375883983 hasRelatedWork W1976640623 @default.
- W2375883983 hasRelatedWork W1977966538 @default.
- W2375883983 hasRelatedWork W2017461631 @default.
- W2375883983 hasRelatedWork W2062393974 @default.
- W2375883983 hasRelatedWork W2351455207 @default.
- W2375883983 hasRelatedWork W2365406490 @default.
- W2375883983 hasRelatedWork W2365625041 @default.
- W2375883983 hasRelatedWork W2365699232 @default.
- W2375883983 hasRelatedWork W2369502809 @default.
- W2375883983 hasRelatedWork W2377222322 @default.
- W2375883983 hasRelatedWork W2377361704 @default.
- W2375883983 hasRelatedWork W2378636253 @default.
- W2375883983 hasRelatedWork W2379119710 @default.
- W2375883983 hasRelatedWork W2379202350 @default.
- W2375883983 hasRelatedWork W2390248813 @default.
- W2375883983 hasRelatedWork W2391068029 @default.
- W2375883983 hasRelatedWork W2586805077 @default.
- W2375883983 hasRelatedWork W2794268172 @default.
- W2375883983 hasRelatedWork W2979021254 @default.
- W2375883983 isParatext "false" @default.
- W2375883983 isRetracted "false" @default.
- W2375883983 magId "2375883983" @default.
- W2375883983 workType "article" @default.