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- W2376175046 abstract "The instrumentation principles and designing of two kinds of white light scanning interferometer systems are studied. One, based on the two-beam Mirau phase-shifting interferometer and the PZT used as a phase shifter, is developed to measure the micro-profile with nanometer accuracy. The other, employing Michelson interferometer for light path compensation, with the polarization states adjusted and controlled by rotating a Glan prism, and by varying reference arm to compensate the difference of light path induced by polarization coupling point, is developed to measure the position of polarization coupling pointing optical fiber. The results are that the spatial resolution of autoecious Polarization coupling measuring apparatus is 50mm, the measure range is 1km, and the detection sensitivity is better than -80 dB." @default.
- W2376175046 created "2016-06-24" @default.
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- W2376175046 date "2004-01-01" @default.
- W2376175046 modified "2023-09-27" @default.
- W2376175046 title "Computerized white light scanning interferometer and the application" @default.
- W2376175046 hasPublicationYear "2004" @default.
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