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- W2376291268 abstract "A new method for fabricating micro-optical elements with aspherical outlines is discussed.The most key technological step is a two-step anisotropic etching of KOH∶H2O to(100) silicon substrate with resistant mask in which many circular openings are preshaped.The size of these openings is according to the feature appearance of the final structure.A pattern structure in substrate can be formed through connecting many small concave spherical structures formed by chemical etching.Using the method,many aspherical and irregular micro-optical elements,which can not be produced by common technologies available currently,can be fabricated easily and efficiently.A model to describe the fabrication is set up and discussed." @default.
- W2376291268 created "2016-06-24" @default.
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- W2376291268 date "2007-01-01" @default.
- W2376291268 modified "2023-09-25" @default.
- W2376291268 title "Fabrication of Aspherical Micro-optical Elements Based on Silicon Anisotropic Etching" @default.
- W2376291268 hasPublicationYear "2007" @default.
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