Matches in SemOpenAlex for { <https://semopenalex.org/work/W2376490407> ?p ?o ?g. }
Showing items 1 to 67 of
67
with 100 items per page.
- W2376490407 abstract "We fabricated a kind of electromagnetic driving cantilever,and chose polyimide(PI) as the material to lower the driving current.And its good performance on insulation and heat-resist guarantees the performance of the driving winding.The dynamical response and structure mode of the micro cantilever were investigated by theoretical calculation and simulation analysis with ANSYS.The structure of the cantilever was optimized with the analytical results.And the manufacture technique was presented.The PI-cantilever and driving winding were fabricated after a series of process such as PI etching,AZ4903 lithography and electroplating,etc." @default.
- W2376490407 created "2016-06-24" @default.
- W2376490407 creator A5054840410 @default.
- W2376490407 date "2007-01-01" @default.
- W2376490407 modified "2023-09-26" @default.
- W2376490407 title "Theory and Experiment of PI-Cantilever" @default.
- W2376490407 hasPublicationYear "2007" @default.
- W2376490407 type Work @default.
- W2376490407 sameAs 2376490407 @default.
- W2376490407 citedByCount "0" @default.
- W2376490407 crossrefType "journal-article" @default.
- W2376490407 hasAuthorship W2376490407A5054840410 @default.
- W2376490407 hasConcept C100460472 @default.
- W2376490407 hasConcept C105487726 @default.
- W2376490407 hasConcept C127413603 @default.
- W2376490407 hasConcept C134406635 @default.
- W2376490407 hasConcept C141354745 @default.
- W2376490407 hasConcept C159985019 @default.
- W2376490407 hasConcept C192562407 @default.
- W2376490407 hasConcept C204223013 @default.
- W2376490407 hasConcept C2779227376 @default.
- W2376490407 hasConcept C2780965675 @default.
- W2376490407 hasConcept C49040817 @default.
- W2376490407 hasConcept C51807945 @default.
- W2376490407 hasConcept C53524968 @default.
- W2376490407 hasConcept C66938386 @default.
- W2376490407 hasConcept C78519656 @default.
- W2376490407 hasConceptScore W2376490407C100460472 @default.
- W2376490407 hasConceptScore W2376490407C105487726 @default.
- W2376490407 hasConceptScore W2376490407C127413603 @default.
- W2376490407 hasConceptScore W2376490407C134406635 @default.
- W2376490407 hasConceptScore W2376490407C141354745 @default.
- W2376490407 hasConceptScore W2376490407C159985019 @default.
- W2376490407 hasConceptScore W2376490407C192562407 @default.
- W2376490407 hasConceptScore W2376490407C204223013 @default.
- W2376490407 hasConceptScore W2376490407C2779227376 @default.
- W2376490407 hasConceptScore W2376490407C2780965675 @default.
- W2376490407 hasConceptScore W2376490407C49040817 @default.
- W2376490407 hasConceptScore W2376490407C51807945 @default.
- W2376490407 hasConceptScore W2376490407C53524968 @default.
- W2376490407 hasConceptScore W2376490407C66938386 @default.
- W2376490407 hasConceptScore W2376490407C78519656 @default.
- W2376490407 hasOpenAccess W2376490407 @default.
- W2376490407 hasRelatedWork W1982325118 @default.
- W2376490407 hasRelatedWork W2052705008 @default.
- W2376490407 hasRelatedWork W2059788117 @default.
- W2376490407 hasRelatedWork W2068252945 @default.
- W2376490407 hasRelatedWork W2068597605 @default.
- W2376490407 hasRelatedWork W2070292656 @default.
- W2376490407 hasRelatedWork W2086866884 @default.
- W2376490407 hasRelatedWork W2118782603 @default.
- W2376490407 hasRelatedWork W2127756526 @default.
- W2376490407 hasRelatedWork W2139181005 @default.
- W2376490407 hasRelatedWork W2368083149 @default.
- W2376490407 hasRelatedWork W2383254748 @default.
- W2376490407 hasRelatedWork W2408614914 @default.
- W2376490407 hasRelatedWork W2586732585 @default.
- W2376490407 hasRelatedWork W2889129776 @default.
- W2376490407 hasRelatedWork W3012183563 @default.
- W2376490407 hasRelatedWork W3176401496 @default.
- W2376490407 hasRelatedWork W2837508726 @default.
- W2376490407 hasRelatedWork W2959009588 @default.
- W2376490407 hasRelatedWork W3020321028 @default.
- W2376490407 isParatext "false" @default.
- W2376490407 isRetracted "false" @default.
- W2376490407 magId "2376490407" @default.
- W2376490407 workType "article" @default.