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- W2376742908 abstract "Aluminium-doped zinc oxide (ZAO) films were prepared on a glass substrate by a self-designed metal organic chemical vapor deposition (MOCVD) method.Zn(C5H7O2)2.H2O and Al(C5H7O3)3 were used as zinc source and aluminum source respectively,and nitrogen was used as a carrier gas.The improvement of the MOCVD equipment could optimize the stability and uniformity of films.The effects of substrate temperature,carrier gas flow rate and water vapor on the structural,optical,electrical properties and deposition rate were investigated.The characters of the films were determined by X-ray diffractometer,scanning electron microscope and ultraviolet-visible spectrometer and four-point probe.The results show that all the thin films are hexagonal wurtzite crystal structures with a highly c-axis orientation.The (002) peak of the films shifts to a lower angle,indicating that Al has been doped into the ZnO lattice and caused the lattice expansion.The films have uniform nano-polycrystalline structures.The optical transmittance of the film is up to 85% in the visible range,the electrical resistivity is lower than 10-4Ω·cm." @default.
- W2376742908 created "2016-06-24" @default.
- W2376742908 creator A5042104519 @default.
- W2376742908 date "2010-01-01" @default.
- W2376742908 modified "2023-09-23" @default.
- W2376742908 title "TRANSPARENT CONDUCTIVE ALUMINIUM-DOPED ZINC OXIDE FILM PREPARED BY METAL ORGANIC CHEMICAL VAPOR DEPOSITION METHOD" @default.
- W2376742908 hasPublicationYear "2010" @default.
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