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• W2377075789 endingPage "215" @default.
• W2377075789 startingPage "205" @default.
• W2377075789 abstract "In this paper, the use of pulsed excimer laser annealing (ELA) for reducing the gate depletion effect associated with polycrystalline-silicon (poly-Si) gate electrodes is investigated. ELA is effective for distributing and activating ion-implanted boron atoms evenly throughout the depth of a poly-Si film. By using a laser energy which is just enough to fully melt the silicon film, very low resistivity (0.58 mΩ.cm) is achieved. The effective gate work function of the poly-Si after laser annealing is reduced by ∼0.3 eV, but it can be recovered with thermal annealing at 600°C. From capacitance-vs.-voltage measurements, it is found that a very high active boron concentration (4×10 20 cm -3 ) can be attained at the gate-oxide interface, with no observable degradation in the gate-oxide quality." @default.
• W2377075789 created "2016-06-24" @default.
• W2377075789 creator A5023067829 @default.
• W2377075789 creator A5045267066 @default.
• W2377075789 creator A5055239126 @default.
• W2377075789 creator A5063366384 @default.
• W2377075789 creator A5068033542 @default.
• W2377075789 date "2004-01-01" @default.
• W2377075789 modified "2023-09-23" @default.
• W2377075789 title "Reduced poly-SI gate depletion effect by pulsed excimer laser annealing" @default.
• W2377075789 cites W1555969351 @default.
• W2377075789 cites W617071296 @default.
• W2377075789 hasPublicationYear "2004" @default.
• W2377075789 type Work @default.
• W2377075789 sameAs 2377075789 @default.
• W2377075789 citedByCount "0" @default.
• W2377075789 crossrefType "journal-article" @default.
• W2377075789 hasAuthorship W2377075789A5023067829 @default.
• W2377075789 hasAuthorship W2377075789A5045267066 @default.
• W2377075789 hasAuthorship W2377075789A5055239126 @default.
• W2377075789 hasAuthorship W2377075789A5063366384 @default.
• W2377075789 hasAuthorship W2377075789A5068033542 @default.
• W2377075789 hasConcept C113196181 @default.
• W2377075789 hasConcept C115235246 @default.
• W2377075789 hasConcept C119599485 @default.
• W2377075789 hasConcept C120665830 @default.
• W2377075789 hasConcept C121332964 @default.
• W2377075789 hasConcept C127413603 @default.
• W2377075789 hasConcept C152909973 @default.
• W2377075789 hasConcept C165801399 @default.
• W2377075789 hasConcept C171250308 @default.
• W2377075789 hasConcept C172385210 @default.
• W2377075789 hasConcept C178790620 @default.
• W2377075789 hasConcept C185592680 @default.
• W2377075789 hasConcept C191897082 @default.
• W2377075789 hasConcept C192562407 @default.
• W2377075789 hasConcept C2361726 @default.
• W2377075789 hasConcept C2777855556 @default.
• W2377075789 hasConcept C2778979257 @default.
• W2377075789 hasConcept C2779227376 @default.
• W2377075789 hasConcept C2779851234 @default.
• W2377075789 hasConcept C2780477314 @default.
• W2377075789 hasConcept C2780565262 @default.
• W2377075789 hasConcept C43617362 @default.
• W2377075789 hasConcept C49040817 @default.
• W2377075789 hasConcept C501308230 @default.
• W2377075789 hasConcept C520434653 @default.
• W2377075789 hasConcept C544956773 @default.
• W2377075789 hasConcept C87359718 @default.
• W2377075789 hasConceptScore W2377075789C113196181 @default.
• W2377075789 hasConceptScore W2377075789C115235246 @default.
• W2377075789 hasConceptScore W2377075789C119599485 @default.
• W2377075789 hasConceptScore W2377075789C120665830 @default.
• W2377075789 hasConceptScore W2377075789C121332964 @default.
• W2377075789 hasConceptScore W2377075789C127413603 @default.
• W2377075789 hasConceptScore W2377075789C152909973 @default.
• W2377075789 hasConceptScore W2377075789C165801399 @default.
• W2377075789 hasConceptScore W2377075789C171250308 @default.
• W2377075789 hasConceptScore W2377075789C172385210 @default.
• W2377075789 hasConceptScore W2377075789C178790620 @default.
• W2377075789 hasConceptScore W2377075789C185592680 @default.
• W2377075789 hasConceptScore W2377075789C191897082 @default.
• W2377075789 hasConceptScore W2377075789C192562407 @default.
• W2377075789 hasConceptScore W2377075789C2361726 @default.
• W2377075789 hasConceptScore W2377075789C2777855556 @default.
• W2377075789 hasConceptScore W2377075789C2778979257 @default.
• W2377075789 hasConceptScore W2377075789C2779227376 @default.
• W2377075789 hasConceptScore W2377075789C2779851234 @default.
• W2377075789 hasConceptScore W2377075789C2780477314 @default.
• W2377075789 hasConceptScore W2377075789C2780565262 @default.
• W2377075789 hasConceptScore W2377075789C43617362 @default.
• W2377075789 hasConceptScore W2377075789C49040817 @default.
• W2377075789 hasConceptScore W2377075789C501308230 @default.
• W2377075789 hasConceptScore W2377075789C520434653 @default.
• W2377075789 hasConceptScore W2377075789C544956773 @default.
• W2377075789 hasConceptScore W2377075789C87359718 @default.
• W2377075789 hasLocation W23770757891 @default.
• W2377075789 hasOpenAccess W2377075789 @default.
• W2377075789 hasPrimaryLocation W23770757891 @default.
• W2377075789 hasRelatedWork W1869827229 @default.
• W2377075789 hasRelatedWork W1967000107 @default.
• W2377075789 hasRelatedWork W1986050182 @default.
• W2377075789 hasRelatedWork W1990207591 @default.
• W2377075789 hasRelatedWork W1994842035 @default.
• W2377075789 hasRelatedWork W1994907166 @default.
• W2377075789 hasRelatedWork W1997946123 @default.
• W2377075789 hasRelatedWork W2020375107 @default.
• W2377075789 hasRelatedWork W2022051857 @default.
• W2377075789 hasRelatedWork W2038076780 @default.
• W2377075789 hasRelatedWork W2062343394 @default.
• W2377075789 hasRelatedWork W2064145674 @default.
• W2377075789 hasRelatedWork W2075212462 @default.
• W2377075789 hasRelatedWork W2078264249 @default.
• W2377075789 hasRelatedWork W2088830786 @default.
• W2377075789 hasRelatedWork W2089920542 @default.
• W2377075789 hasRelatedWork W2099135470 @default.
• W2377075789 hasRelatedWork W2170723991 @default.
• W2377075789 hasRelatedWork W27569159 @default.

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