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- W2377325896 abstract "With the development of Micro-electro-mechanical systems (MEMS), micromachining technologies have been accepted widely as micro-processes due to their performances and information integrations in micro-scale. The concept, the content and the recent products developed of micromachining are presented in detail. Super-precision, silicon micro-processing, LIGA, atomic force microscope(AFM) and imprint lithography technologies have used for micromachining in MEMS have been introduced, and their advantages and disadvantages, applicability and reliability have been discussed in the future in detail." @default.
- W2377325896 created "2016-06-24" @default.
- W2377325896 creator A5060210788 @default.
- W2377325896 date "2006-01-01" @default.
- W2377325896 modified "2023-09-23" @default.
- W2377325896 title "Development of Micromachining Technologies" @default.
- W2377325896 hasPublicationYear "2006" @default.
- W2377325896 type Work @default.
- W2377325896 sameAs 2377325896 @default.
- W2377325896 citedByCount "0" @default.
- W2377325896 crossrefType "journal-article" @default.
- W2377325896 hasAuthorship W2377325896A5060210788 @default.
- W2377325896 hasConcept C121332964 @default.
- W2377325896 hasConcept C127413603 @default.
- W2377325896 hasConcept C136525101 @default.
- W2377325896 hasConcept C142724271 @default.
- W2377325896 hasConcept C145667562 @default.
- W2377325896 hasConcept C145695476 @default.
- W2377325896 hasConcept C163258240 @default.
- W2377325896 hasConcept C171250308 @default.
- W2377325896 hasConcept C192562407 @default.
- W2377325896 hasConcept C204223013 @default.
- W2377325896 hasConcept C204787440 @default.
- W2377325896 hasConcept C2778939432 @default.
- W2377325896 hasConcept C37977207 @default.
- W2377325896 hasConcept C41075158 @default.
- W2377325896 hasConcept C43214815 @default.
- W2377325896 hasConcept C49040817 @default.
- W2377325896 hasConcept C57528182 @default.
- W2377325896 hasConcept C62520636 @default.
- W2377325896 hasConcept C71924100 @default.
- W2377325896 hasConcept C78519656 @default.
- W2377325896 hasConceptScore W2377325896C121332964 @default.
- W2377325896 hasConceptScore W2377325896C127413603 @default.
- W2377325896 hasConceptScore W2377325896C136525101 @default.
- W2377325896 hasConceptScore W2377325896C142724271 @default.
- W2377325896 hasConceptScore W2377325896C145667562 @default.
- W2377325896 hasConceptScore W2377325896C145695476 @default.
- W2377325896 hasConceptScore W2377325896C163258240 @default.
- W2377325896 hasConceptScore W2377325896C171250308 @default.
- W2377325896 hasConceptScore W2377325896C192562407 @default.
- W2377325896 hasConceptScore W2377325896C204223013 @default.
- W2377325896 hasConceptScore W2377325896C204787440 @default.
- W2377325896 hasConceptScore W2377325896C2778939432 @default.
- W2377325896 hasConceptScore W2377325896C37977207 @default.
- W2377325896 hasConceptScore W2377325896C41075158 @default.
- W2377325896 hasConceptScore W2377325896C43214815 @default.
- W2377325896 hasConceptScore W2377325896C49040817 @default.
- W2377325896 hasConceptScore W2377325896C57528182 @default.
- W2377325896 hasConceptScore W2377325896C62520636 @default.
- W2377325896 hasConceptScore W2377325896C71924100 @default.
- W2377325896 hasConceptScore W2377325896C78519656 @default.
- W2377325896 hasOpenAccess W2377325896 @default.
- W2377325896 hasRelatedWork W1931477879 @default.
- W2377325896 hasRelatedWork W1969122164 @default.
- W2377325896 hasRelatedWork W199926285 @default.
- W2377325896 hasRelatedWork W2044305683 @default.
- W2377325896 hasRelatedWork W2081681582 @default.
- W2377325896 hasRelatedWork W2363057384 @default.
- W2377325896 hasRelatedWork W2367133669 @default.
- W2377325896 hasRelatedWork W2371345570 @default.
- W2377325896 hasRelatedWork W2392449515 @default.
- W2377325896 hasRelatedWork W2470591551 @default.
- W2377325896 hasRelatedWork W2504348258 @default.
- W2377325896 hasRelatedWork W2520430708 @default.
- W2377325896 hasRelatedWork W2547781058 @default.
- W2377325896 hasRelatedWork W2609186882 @default.
- W2377325896 hasRelatedWork W2914863938 @default.
- W2377325896 hasRelatedWork W2945859940 @default.
- W2377325896 hasRelatedWork W2953106704 @default.
- W2377325896 hasRelatedWork W51362942 @default.
- W2377325896 hasRelatedWork W6382885 @default.
- W2377325896 hasRelatedWork W2184753726 @default.
- W2377325896 isParatext "false" @default.
- W2377325896 isRetracted "false" @default.
- W2377325896 magId "2377325896" @default.
- W2377325896 workType "article" @default.