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- W2377774875 abstract "MIM capacitor with the Au/NiCr/SiNx/Au/NiCr structure was fabricated by depositing and photo etching two layers of Au/NiCr electrode film and one layer of silicon nitride(SiNx) dielectric film on the glazed alumina ceramic substrate.The electrode film and dielectric film were prepared by the vacuum resistive evaporation method and the plasma-enhanced chemical vapor deposition method,respectively.The electrical properties of the MIM capacitor were studied.The MIM capacitor exhibits low dielectric loss with a tanδ of 0.00192 at 1 MHz and high voltage stability.The TCC of the capacitor at 1 MHz in the range of –55℃ to 150℃ is 258×10–6/℃.Highly symmetric I-V curves,low leakage current density and high breakdown voltage are also found for the capacitor." @default.
- W2377774875 created "2016-06-24" @default.
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- W2377774875 date "2010-01-01" @default.
- W2377774875 modified "2023-09-24" @default.
- W2377774875 title "Fabrication and properties of silicon nitride thin film MIM capacitor" @default.
- W2377774875 hasPublicationYear "2010" @default.
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